Description
The Hitachi Regulus 8200 series is a high-resolution field emission SEM featuring Hitachi's proprietary cold FE gun technology. With 0.6 nm resolution at 15 kV and EDS/EBSD integration, it supports comprehensive microstructural and compositional analysis. Low-voltage imaging capability makes it well suited for beam-sensitive materials including polymers, biological specimens, and advanced ceramic composites.
Specifications
| Accelerating Voltage Kv | 0.01, 30 |
|---|---|
| Electron Source | Cold FEG |
| Resolution Nm | 0.6 |
| Magnification Range | 20, 2000000 |
| Detector Types | Top SE, Upper SE+BSE, ExB filter |
| Beam Deceleration Mode | Yes |
| Low Damage Observation | Yes |
| Eds Integrated | Yes |
Imaging Modes
Secondary Electron
Backscattered Electron
Low Voltage
Beam Deceleration
Typical Specimens
Polymer
Biological Uncoated
Beam Sensitive
Semiconductor