SU9000

SU9000

Hitachi High-Tech · Japan · Introduced 2011
Microscope Uhv Sem Stem Electron Sem
Description

The Hitachi SU9000 is an ultra-high-resolution cold field emission in-lens SEM delivering world-leading 0.4 nm SE resolution at 30 kV. Its true in-lens design positions the sample inside the objective lens pole piece gap, combined with next-generation cold FEG technology for maximum brightness and stability. The 2+2 detection system with patented Super ExB filter provides surface, compositional, and transmission imaging. As a powerful low-kV STEM with 0.34 nm resolution, EELS with 400 meV energy resolution, and simultaneous BF/DF imaging with 56 darkfield detector positions, it bridges SEM and TEM for advanced nanocharacterization of catalysts, nanomaterials, graphene, and biological specimens.

Specifications
Manufacturer Hitachi High-Tech
Model Name SU9000
Model Number SU9000
Accelerating Voltage Kv 0.5, 30
Electron Source Cold FEG
Sem Resolution Nm 30kv 0.4
Sem Resolution Nm 1kv 1.2
Sem Resolution Nm 1kv Decel 0.8
Stem Resolution Nm 0.34
Magnification Range 100, 3000000
Routine Magnification 1000000
Detector System 2+2 detection
Detector Types Upper SE (Super ExB filter), Top BSE (HA-BSE), STEM-BF, STEM-DF (56 positions)
In Lens Design Yes
Eds Capable Yes
Eds Collection Angle Sr 0.7
Eels Capable Yes
Eels Energy Resolution Mev 400
Eels Detectors 2
Eels Fps 10000
Vacuum Level UHV
Sample Stage side-entry
Max Sample Size Mm 5.0 x 9.5 x 3.5
Beam Deceleration Yes
Diffraction Capable Yes
Imaging Modes
Secondary Electron Backscattered Electron Stem Bf Stem Df Low Voltage Stem Eds Mapping Eels Energy Filtered Stem Diffraction
Typical Specimens
Nanomaterials Catalyst Carbon Nanotubes Graphene Quantum Dots Biological Immunolabeling Semiconductor Nanoparticles
Clinical Applications
Nanomaterial Characterization Catalyst Research Semiconductor Failure Analysis Pharmaceutical Immunolabeling Materials Science Life Sciences