SU9000

Hitachi High-Tech · Japan · Introduced 2012
Microscope Uhv Sem Stem Electron Sem
Description

The Hitachi SU9000 is an ultra-high-resolution cold field emission SEM delivering sub-nanometer imaging at 0.4 nm resolution. Equipped with STEM and BF/DF detectors, it bridges the gap between conventional SEM and TEM for advanced nanocharacterization. In-lens SE and BSE detectors provide exceptional surface sensitivity for semiconductor failure analysis, nanomaterial research, and catalysis studies.

Specifications
Accelerating Voltage Kv 0.5, 30
Electron Source Cold FEG
Sem Resolution Nm 0.4
Stem Resolution Nm 0.34
Magnification Range 100, 2000000
Detector Types SE, BSE, TE, STEM-BF, STEM-DF
In Lens Design Yes
Eds Capable Yes
Imaging Modes
Secondary Electron Backscattered Electron Stem In Sem Eds Mapping
Typical Specimens
Nanomaterials Catalyst Carbon Nanotubes Quantum Dots