Description
The Helios 5 UX is a DualBeam FIB/SEM combining a high-resolution scanning electron column with a precision Ga+ focused ion beam for site-specific cross-sectioning, TEM lamella preparation, and 3D serial sectioning. Sub-nanometer SEM imaging and sub-5 nm FIB milling resolution enable nanoscale sample preparation and characterization. It is essential for semiconductor process control, advanced materials research, and failure analysis.
Specifications
| Accelerating Voltage Kv | 0.02, 30 |
|---|---|
| Electron Source | UC+ Schottky FEG |
| Sem Resolution Nm | 0.6 |
| Ion Source | Ga LMIS |
| Ion Beam Voltage Kv | 0.5, 30 |
| Fib Resolution Nm | 2.5 |
| Magnification Range | 55, 2400000 |
| Gas Injection System | Yes |
| In Situ Lift Out | Yes |
| Cryo Option | Yes |
| Autotem Capable | Yes |
| Slice And View 3d | Yes |
Imaging Modes
Secondary Electron
Backscattered Electron
Fib Milling
Tem Lamella Prep
3d Tomography
Typical Specimens
Semiconductor
Materials
Biological 3d
Failure Analysis