Xradia 800 Ultra

Zeiss · Germany · Introduced 2012
Microscope X Ray Microscope X Ray Nanoscale
Description

The Xradia 800 Ultra is ZEISS's highest-resolution laboratory X-ray microscope, achieving 50 nm spatial resolution using a Cr X-ray source and Fresnel zone plate optics. It enables non-destructive nanoscale 3D imaging of internal structures that were previously only visible with synchrotron radiation. Key applications include integrated circuit (IC) interconnect inspection, polymer nanocomposite analysis, and biological cell ultrastructure visualization.

Specifications
Voltage Kv 5.4
Source Type rotating_anode_cr_ka
Detector Type high_resolution_CCD
Spatial Resolution Nm 50
Minimum Voxel Size Nm 16
Max Sample Diameter Um 65
Optics Type fresnel_zone_plate
Zone Plate Resolution Nm 50
Field Of View Um 65
Rotation Range Deg 360
Phase Contrast Zernike Yes
Absorption Contrast Yes
Filters None, Zernike
Lab Based Yes
Imaging Modes
Absorption Contrast Zernike Phase Contrast Nano Tomography Mosaic Tomography
Typical Specimens
Semiconductor Interconnect Catalyst Nanoparticle Battery Electrode Polymer Nanocomposite Porous Membrane